Senior Mechanical Engineering Manager - Vacuum Systems

About the role

KLA's RAPID division, which leads reticle inspection solutions for semiconductor manufacturing, is looking for a Senior Mechanical Engineering Manager to lead mechanical development for next-generation EUV light sources in its reticle inspection products. The role leads a multidisciplinary mechanical team delivering precision hardware that operates in extreme environments such as high vacuum, high-power lasers, thermal transients, precision opto-mechanics and precision motion mechanisms.

Key responsibilities

• Lead and develop a high-performing mechanical engineering team, setting technical direction, priorities and execution plans to deliver on schedule, cost and quality.
• Own mechanical system architecture and delivery for EUV source subsystems, including vacuum chambers and ultra-clean/UHV-compatible hardware, laser/mechanical integration and beam delivery packaging, collector mirror mounting and alignment mechanisms, plasma target delivery hardware, precision motion components, gas delivery interfaces, thermal management and structural dynamics.
• Drive design review and release discipline, including requirements definition, tolerance analysis, validation/qualification planning and documentation quality.
• Partner with Technology, Optics, Systems, Production Development, Machine Controls, Manufacturing and Service to improve cost, performance, manufacturability, reliability and serviceability.
• Lead root-cause analysis and corrective actions for complex subsystem issues, and manage supplier technical engagement for precision parts and subassemblies.
• Embed safety-by-design and enable safety service and production tooling (jigs, fixtures, alignment tools, handling concepts).
• Occasional domestic or international travel may be required to support build/validation and customer-site readiness.

Required profile

• B.S. in Mechanical Engineering (M.S. preferred) or equivalent related discipline.
• 10+ years of experience developing complex hardware or capital equipment (semiconductor tools, precision vacuum systems, opto-mechanical equipment, aerospace-grade mechanisms or similar).
• 5+ years of people management experience leading engineers through concept-to-release development.
• Preferred: experience with EUV-adjacent source or illumination subsystems, high-power laser-integrated hardware, or precision opto-mechanical alignment systems; experience with cryogenic mechanisms and vacuum feedthroughs/seals; track record of production transfer and sustaining engineering support.

Required skills

• Demonstrated expertise in several of: vacuum/UHV design, precision mechanisms, rotating machinery/air bearings, thermal-structural design, vibration/dynamics, contamination-aware mechanical design, and design-for-manufacture/serviceability.
• Strong cross-functional communication and leadership, able to align technical stakeholders and suppliers.

What we offer

• Base pay range of $181,000 to $265,467 annually, depending on role, level and location.
• Possible performance incentive programs and benefits such as medical, dental, vision, life insurance, 401(k) with company matching, ESPP, tuition reimbursement, EAP, paid time off and family care leave.